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Anguang won the first prize of Anhui Province's 2019 technology invention
[ Instrument R&D of Instrument Network ] On the morning of June 29, the Anhui Provincial Science and Technology Award Awards Conference was held in Hefei. A number of teams including Anguang Institute Fang Xiaodong's excimer laser team, who completed the first prize of Anhui Province's 2019 technological invention award project "Eximer laser excitation source technology and application for semiconductor integrated circuit lithography", were honored at the meeting.
Researcher Fang Xiaodong
Award-winning projects
The project team of "Eximer laser excitation source technology and application for semiconductor integrated circuit lithography", with the support of major national science and technology projects, has broken through the high-performance excimer for the national strategic needs of semiconductor manufacturing, flat panel manufacturing and other industries The technical bottleneck of laser excitation source and energy stability control and obtained a number of core technical inventions. On this basis, we successfully developed a 4kHz full curing pulse discharge excitation system and applied it to the first domestic 90nm lithography machine light source, which promoted semiconductor integration The localization process of circuit lithography equipment.
The project team invented a high-repetition frequency full-curing pulse discharge excitation system based on high-power semiconductor switching technology and magnetic pulse compression technology; invented an oscillation-amplification (MOPA) structure high-repetition rate excimer laser precise synchronization control system; invented an excimer Laser energy precise control and stabilization system; invented high-precision energy storage voltage control technology, proposed a new pulse energy control algorithm, and created a high repetition rate excimer laser pulse energy stabilization control system to meet the needs of semiconductor integrated circuit lithography applications The precise control of exposure dose is required.
The technical achievements of the project have been applied in the field of domestic high-end semiconductor integrated circuit lithography machine manufacturing, high-end medical and scientific research, breaking the long-term monopoly of core technologies in this field by a few countries, and obtaining good economic and social benefits.